Manipulation of CNT & CNT-based chemical sensors
Detection of radicals and partial discharge using CNT-based chemical sensors
Manipulation technique of nanotubes using dielectrophoresis (DEP)
Bio & Environmental application of CNTs and nanoparticles
Evaluation of biocompatibility of CNTs and development of high sensitive bio-sensors for detecting reaction of bio-molecules
Monitoring of ultrafine particle at a roadside for reduction of air pollution
Nano Materials (nanocomposites & nanoparticles)
Development of nanocomposites with CNTs
Synthesis of Si nanoparticles using plasma & pyrolysis
Film & pattern formation using metal particles for IT application
Immersed Finite Element Method, Multi-scale Simulation
Modeling of nanoparticle formation & transport
Evaluation of 45 nm level megasonic cleaning system
Development of high sensitive CNT-based chemical sensors
Single-walled carbon nanotubes (SWNTs) have optimal characteristics as sensor elements such as large surface-to-volume ratios, one dimensional electronic structure and a molecular composition consisting of only surface atoms.
Fast conductance modulation of the SWNT matt in response to neutralized fluorine radicals is observed.
Manipulation techniques of CNT using dielectrophoresis method
Dielectrophoresis has received considerable attention for separating nanotubes according to electronic types.
Positive dielectrophoresis (toward the electrodes) is observed for metallic SWNT due to the large dielectric constant.
Development of nanocomposites
Development of electrically improved metal paste by functionalized carbon nanotubes.
Development of Cu & Al nanocomposite reinforced with carbon nanotubes
Nanoparticels synthesis & appliaction
Si nanoparticle generation using pulse plasma technology & 2 stage pyrolysis
Via hole filling & film formation using metal particles
Nanocomposite film treatment using CMP
Immersed Finite Element Method
A Lagrangian solid interaction force vectorinto the N-S equation using a meshfree method
Coupling with Electro-mechanics to model electric field guided CNTs assembly
meso-, micro- & nano- level behavior within continuum models
Interdisciplinary nature of multiscale methods
Modeling of Nanoparticle Formation and Transport
Coupling between aerosol dynamics & chemical kinetics model for particle formation
Particle transport during semiconductor & display process.
Evaluation of 45nm-level megasonic cleaning system
Study the origin of pattern damage and design the megasonic with damage-free
Optimize the megasonic cleaning process to enhance the cleaning efficiency
Development of nanoparticle measuring equipment
Development of particle beam mass spectroscopy (PBMS)
Development of particle measurement equipment using light scattering
Development of low pressure differential mobility