RESEARCH

ANALYSIS INSTRUMENTS

Processing equipment

 

Mask Aligner

RF&DC Magnetron
Sputtering System

PECVD

E-beam evaporator

Thermal evaporator

 

Ion Beam Assisted
Deposition

High Resolution sputter
coater for FE-SEM

ICP Etcher

Reactive ion etcher

Atomic Layer
Etching System

 

Neutral beam
etching system

Annealing system

Dry oven

Spin coater

 


Analytical equipment

8-inch probe station

Field Emission Scanning
Electron Microscope

UV/VIS
Spectrophotometer

Fluorescence
spectrometer

Micro-Raman
spectrometer

 

Small Angle
X-ray Diffractometer

AFM

Scanning Mobility
Particle Sizer(SMPS)

Wafer Surface Scanner

Surface profilometer

 

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