[LECTURE] SPECIAL LECTURE (Sep. 26, Thu. 16:00) Jung Sung-tae (Samsung Electronics)
- SAINT
- Hit720
- 2024-09-20
성균나노과학기술원(SAINT)에서는 삼성전자 정성태 박사님을 모시고 SPECIAL LECTURE 세미나를 개최하오니 관심 있는 분들의 많은 참석 부탁드립니다.
■ Speaker: Dr. Jung Sung-tae
■ Time: Thursday, Sep. 26, Thu. 16:00
■ Place: e+ Lecture Hall (room 83188), 2nd Research Building, Sungkyunkwan University
■ Contact: SAINT OFFICE (031-299-4115)
■강의초록
For the past 40 years, semiconductor device scaling has been driven by lithography patterning. We will reviedw how optical porximity correction has been fundamental technology to support subwavelength lithoghraphy through its accurate simulation capability and correction technology. We will look into the future of semiconductor patterning where more computational patterning with inverse lithography/AI/ML will play a key role.
■CV
20222- Present Fellow in charge of OPC, SRD, Samsung
2019-2022 Fellow, TD, Intel Corp
2000-2019 Engineer, OPC,TD, Intel Corp
1998-2000 Staff Scientist, CXRO, LBNL
1997 PhD in Physics UC Berkele