Chemical Mechanical Polishing/Cleaning/Contamination control (Cleanroom)
2D nanomaterial synthesis and application
Nanoparticle instrumentation and control
Atmospheric/indoor air quality control
Sensor (environmental, biomedical application)
Education
(Ph.D.) University of Minnesota, Mechanical Engineering, 2002
(M.S.) University of Minnesota, Mechanical Engineering, 1998
(B.S.) Seoul National University, Mechanical Engineering, 1994
Experience
2005.03 - present: SKKU School of Mechanical Engineering, Professor
2023.01 - present: SKKU College of Engineering, Dean
2023.01 - present: National Academy of Engineering of Korea, Associate Member
2020.01 - present: ISO/TC209 Head of delegation (Korea)
2019.01 - 2020.12: SKKU Admissions Office, Vice President
2014.03 - 2018.12: SKKU Business Foundation, Vice President
(2025)
MXene/PEDOT:PSS-based dual-biomarker impedimetric immunosensor for accurate differentiation of prostate cancer from BPH through urinary detection.
BIOSENSORS & BIOELECTRONICS.
289,
(2025)
Nanoparticle size distribution measurement scheme using mass-to-charge ratio measurements with Vacuum Ultraviolet irradiation in medium vacuum.
JOURNAL OF AEROSOL SCIENCE.
189,
(2025)
A numerical study on the optimal placement of two air purifiers for simultaneous operation in a school classroom.
International Journal of Air-Conditioning and Refrigeration.
33,
1
(2025)
Reversible Thixotropic Rheological Properties of Graphene-Incorporated Epoxy Inks for Self-Standing 3D Printing.
ACS Macro Letters.
14,
2
(2024)
Optimization of surface filtration to enhance wafer uniformity by removing large particle in ceria slurry.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING.
183,
(2024)
Enhanced particle removal ability of two representative nonionic surfactants: A reasonable interpretation based on DFT and coarse-grained molecular dynamics methods.
JOURNAL OF MOLECULAR LIQUIDS.
413,
(2024)
Investigation of the removal mechanism in amorphous carbon chemical mechanical polishing for achieving an atomic-scale roughness.
APPLIED SURFACE SCIENCE.
671,
(2024)
An eddy current sensor for end-point detection in chemical mechanical planarization using composition signal filtration and a digital potentiometer.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING.
181,
(2024)
Investigating the Impact of Pad Groove Depth Reduction on Process Variation in Oxide Chemical Mechanical Polishing.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY.
13,
10
(2024)
Electron Release via Internal Polarization Fields for Optimal S-H Bonding States.
ADVANCED MATERIALS.
(2024)
Particle size dependence of nanoclustered ceria abrasives on surface activity and chemical mechanical planarization performance.
APPLIED SURFACE SCIENCE.
663,
(2024)
In Situ Bipolar Doping via Mechanically Controlled Dipole Under Water.
ADVANCED MATERIALS INTERFACES.
11,
17
(2024)
Investigation of thermal effects in bulk oxide chemical mechanical polishing.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY.
88,
(2024)
Effects of Gas-Dissolved Water for Ceria Nanoparticles on the SiO<sub>2</sub> Film Surface in Post-CMP Cleaning.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY.
13,
5
(2024)
Investigation of Polisher Head and Slurry Sweep Effect in Oxide Film Polishing.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY.
13,
4
(2024)
Development of Novel Conditioning Method Using Thermal Shape Memory Characteristics of Polyurethane CMP Pad.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY.
13,
3
(2024)
Remote-Controllable Interfacial Electron Tunneling at Heterogeneous Molecular Junctions via Tip-Induced Optoelectrical Engineering.
ADVANCED SCIENCE.
11,
5
Patent/Intellectual Property
CHEMICAL MECHANICAL POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE SAME.
17/026,554.
20231114.
UNITED STATES
Heterojunction material and method of preparing the same.
17/325,545.
20230822.
UNITED STATES
Preparing method of polishing composition.
17/330,494.
20230530.
UNITED STATES
폴리싱 패드 컨디셔닝 시뮬레이션 방법 및 장치(simulation method and apparatus for conditioning polishing pad).
10-2352-9720000.
20220114.
KOREA, REPUBLIC OF
입자 포집 장치(Particles Collecting Apparatus).
10-2135-1400000.
20200713.
KOREA, REPUBLIC OF
집광 태양 전지를 이용한 수상형 복합 발전 시스템.
10-2016-0136440.
20190312.
KOREA, REPUBLIC OF
열전 특성 측정장치.
10-2017-0029250.
20181220.
KOREA, REPUBLIC OF
대면적 경면 폴리싱 장비 공정 개발.
10-2017-0055139.
20180221.
KOREA, REPUBLIC OF
전이금속 물질을 첨가한 세리아 슬러리 개발.
10-2017-0055071.
20180221.
KOREA, REPUBLIC OF
광섬유와 모세관을 이용한 힘센서, 이의 제조방법,이를 포함하는 의료기기.
10-2016-0039080.
20171107.
KOREA, REPUBLIC OF
직렬로 배열된 광섬유를 이용한 힘센서, 이의 제조방법, 이를 포함하는 의료기기.
10-2016-0039113.
20171107.
KOREA, REPUBLIC OF
2 차원 전이금속 디칼코지나이드의 제조 방법(PREPARING METHOD OF TWO-DIMENSIONAL TRANSITION METAL DICHALCOGENIDE).
10-1770235-0000.
20170816.
KOREA, REPUBLIC OF
플라즈마 멸균기 및 플라즈마 멸균기의 과산화수소 기체 발생장치(PLASMA STERILIZER AND APPARATUS FOR GENERATING HYDROGEN PEROXIDE VAPOR IN THE STERILIZER).
10-1756550-0000.
20170704.
KOREA, REPUBLIC OF
광섬유를 이용한 힘 센서 및 이를 이용한 카테터(FORCE SENSOR USING OPTICAL FIBER AND CATHETHER USING THE SAME).
10-1726024-0000.
20170405.
KOREA, REPUBLIC OF
스마트폰을 기반으로 하는 현장용 그래프 수치 분석 어플리케이션 및 그를 이용한 수치 분석방법(In-situ graph analysis application for smart-phone).
10-1712391-0000.
20170227.
KOREA, REPUBLIC OF
열전박막의 제백계수 측정장치.
10-2014-0167083.
20161025.
KOREA, REPUBLIC OF
열전박막의 수직방향 열전특성 측정센서유닛(Thermal properties measurement sensors for thermoelectric thin film in cross-plane direction).
10-1662713-0000.
20160928.
KOREA, REPUBLIC OF
열전박막의 수평 및 수직방향 제백계수 측정 센서 유닛.
10-2014-0167084.
20160928.
KOREA, REPUBLIC OF
슬릿이 형성된 공기역학 렌즈.
10-2014-0039889.
20160405.
KOREA, REPUBLIC OF
전기장을 이용하는 에어로졸 생성 장치.
10-2014-0113049.
20151109.
KOREA, REPUBLIC OF
Honors / Awards
Nam-Heon Academic Award for Junior Researcher, KSME, 2022
Minister Award recommended by KAMFO, Korea Ministry of LIT, 2022
Asian Academic Award (AAA), 2021
Minister Award for SAREK best paper, Korea Ministry of LIT, 2018
Minister Award for Clean Air Industry Development, Korea Ministry of Environment, 2017
Governor Award for Excellent BI operation, Gyenggi-do, 2015
SKKU Young Fellow, Sungkyunkwan University, 2014
Conference Paper
(2022)
Application of electrosprayscanning mobility particle sizer for the measurement of mixed abrasive slurry in chemical mechanical planarization process.
International Aerosol Conference 2022.
GREECE
(2020)
포집부 최적화를 통한 습식 사이클론의 바이오에어로졸 포집효율 향상.
2020년 대한설비공학회 동계학술발표대회.
KOREA, REPUBLIC OF
(2020)
A Study on Portable Axial Wet Cyclone for The Fungi Collection.
Indoo Air 2020.
KOREA, REPUBLIC OF
(2020)
광산화를 이용한 CMP 공정용 고연마율 세리아 슬러리 제조 방법.
2020년 한국지식재산교육연구학회.
KOREA, REPUBLIC OF
(2020)
SMPS를 사용한 CMP공정의 Lumped SiO2 분석.
2020년 한국입자에어로졸학회 학술대회.
KOREA, REPUBLIC OF
(2020)
Viscosity for Ceria Abrasive Removal in Buffing CMP Process.
31회 세정기술협의회.
KOREA, REPUBLIC OF
(2020)
CMP 공정에서 결함 유발 입자에 대한 특성 분석 기술 개발.
2020년 반도체디스플레이기술학회 추계학술대회.
KOREA, REPUBLIC OF
(2020)
곰팡이 포집용 축류형 습식 사이클론 샘플러 개발 및 성능 평가.
2020년 대한설비공학회 하계학술발표대회.
KOREA, REPUBLIC OF
(2020)
A Wearable System for Knee Flexion / Extension Monitoring: Design and Assessment.
IEEE METROIND4.0&IoT.
ITALY
(2020)
플라즈마 화학기상증착법을 통한 고수율 이황화 몰리브데늄/ 실리콘 디아오드 합성.
제58회 한국진공학회 동계정기학술대회.
KOREA, REPUBLIC OF
(2019)
Wafer Scale Synthesis of MoS2-Graphene Heterostructure at Low Temperature and its HER Application.
2019 MRS Fall Meeting & Exhibit.
UNITED STATES
(2019)
Cu CMP에서 서로 다른 크기의 실리카를 이용한 혼합 연마입자 슬러리에 관한 연구.
한국반도체디스플레이기술학회 추계학술대회.
KOREA, REPUBLIC OF
(2019)
A Numerical Study on Slurry Flow with CMP Pad Grooves.
ICPT.
TAIWAN
(2019)
Study of sub-100 nm Particle Deposition on Silicon Wafer.
한국입자에어로졸학회 학술대회.
KOREA, REPUBLIC OF
(2019)
Hierarchical nanocomposite of nitrogen-doped molybdenum sulphide and molybdenum oxide for supercapacitor application.
2019 Nano Korea.
KOREA, REPUBLIC OF
(2019)
Development of a Wearable and Wireless Sensor for Monitoring Knee Posture based on Fiber Bragg Grating and Flexible Polymer.
2019 Medical Measurements & Applications.
TURKEY
(2019)
건물 내부 공기 질 개선 위한 에어로졸 포집 기술 개발.
대한설비공학회 하계학술발표대회.
KOREA, REPUBLIC OF
(2019)
Development and Evaluation of Tri-Axial Fiber Bragg Grating in a Measurement Module for Catheterization.
2019 IEEE International Workshop on Metrology for Industry 4.0 and IoT.
ITALY
(2019)
In-situ Monitoring Hydrodynamic Pressure Distribution during Chemical Mechanical Polishing.
2019 IEEE International Workshop on Metrology for Industry 4.0 and IoT.
ITALY
(2019)
Prediction of Pad Wear Depending on Structural Factors of Diamond Conditioner.
235th ECS Meeting.
UNITED STATES
