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Manipulation of CNT & CNT-based chemical sensorsDetection of radicals and partial discharge using CNT-based chemical sensors Manipulation technique of nanotubes using dielectrophoresis (DEP) Bio & Environmental application of CNTs and nanoparticlesEvaluation of biocompatibility of CNTs and development of high sensitive bio-sensors for detecting reaction of bio-molecules Monitoring of ultrafine particle at a roadside for reduction of air pollution Nano Materials (nanocomposites & nanoparticles)Development of nanocomposites with CNTs Synthesis of Si nanoparticles using plasma & pyrolysis Film & pattern formation using metal particles for IT application NanosimulationImmersed Finite Element Method, Multi-scale Simulation Modeling of nanoparticle formation & transport Contamination controlEvaluation of 45 nm level megasonic cleaning system
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Development of high sensitive CNT-based chemical sensorsSingle-walled carbon nanotubes (SWNTs) have optimal characteristics as sensor elements such as large surface-to-volume ratios, one dimensional electronic structure and a molecular composition consisting of only surface atoms. Fast conductance modulation of the SWNT matt in response to neutralized fluorine radicals is observed. Manipulation techniques of CNT using dielectrophoresis methodDielectrophoresis has received considerable attention for separating nanotubes according to electronic types. Positive dielectrophoresis (toward the electrodes) is observed for metallic SWNT due to the large dielectric constant. |
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Development of nanocompositesDevelopment of electrically improved metal paste by functionalized carbon nanotubes. Development of Cu & Al nanocomposite reinforced with carbon nanotubes Nanoparticels synthesis & appliactionSi nanoparticle generation using pulse plasma technology & 2 stage pyrolysis Via hole filling & film formation using metal particles Nanocomposite film treatment using CMP |
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Immersed Finite Element MethodA Lagrangian solid interaction force vectorinto the N-S equation using a meshfree method Coupling with Electro-mechanics to model electric field guided CNTs assembly Multi-scale Simulationmeso-, micro- & nano- level behavior within continuum models Interdisciplinary nature of multiscale methods Modeling of Nanoparticle Formation and TransportCoupling between aerosol dynamics & chemical kinetics model for particle formation Particle transport during semiconductor & display process. |
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Evaluation of 45nm-level megasonic cleaning systemStudy the origin of pattern damage and design the megasonic with damage-free Optimize the megasonic cleaning process to enhance the cleaning efficiency Development of nanoparticle measuring equipmentDevelopment of particle beam mass spectroscopy (PBMS) Development of particle measurement equipment using light scattering Development of low pressure differential mobility |