Manipulation of CNT & CNT-based chemical sensors

Detection of radicals and partial discharge using CNT-based chemical sensors

Manipulation technique of nanotubes using dielectrophoresis (DEP)

Bio & Environmental application of CNTs and nanoparticles

Evaluation of biocompatibility of CNTs and development of high sensitive bio-sensors for detecting reaction of bio-molecules

Monitoring of ultrafine particle at a roadside for reduction of air pollution

Nano Materials (nanocomposites & nanoparticles)

Development of nanocomposites with CNTs

Synthesis of Si nanoparticles using plasma & pyrolysis

Film & pattern formation using metal particles for IT application

Nanosimulation

Immersed Finite Element Method, Multi-scale Simulation

Modeling of nanoparticle formation & transport

Contamination control

Evaluation of 45 nm level megasonic cleaning system

• -Development of nanoparticle measuring equipment

Development of high sensitive CNT-based chemical sensors

Single-walled carbon nanotubes (SWNTs) have optimal characteristics as sensor elements such as large surface-to-volume ratios, one dimensional electronic structure and a molecular composition consisting of only surface atoms.

Fast conductance modulation of the SWNT matt in response to neutralized fluorine radicals is observed.

Manipulation techniques of CNT using dielectrophoresis method

Dielectrophoresis has received considerable attention for separating nanotubes according to electronic types.

Positive dielectrophoresis (toward the electrodes) is observed for metallic SWNT due to the large dielectric constant.

Development of nanocomposites

Development of electrically improved metal paste by functionalized carbon nanotubes.

Development of Cu & Al nanocomposite reinforced with carbon nanotubes

Nanoparticels synthesis & appliaction

Si nanoparticle generation using pulse plasma technology & 2 stage pyrolysis

Via hole filling & film formation using metal particles

Nanocomposite film treatment using CMP

Immersed Finite Element Method

A Lagrangian solid interaction force vectorinto the N-S equation using a meshfree method

Coupling with Electro-mechanics to model electric field guided CNTs assembly

Multi-scale Simulation

meso-, micro- & nano- level behavior within continuum models

Interdisciplinary nature of multiscale methods

Modeling of Nanoparticle Formation and Transport

Coupling between aerosol dynamics & chemical kinetics model for particle formation

Particle transport during semiconductor & display process.

Evaluation of 45nm-level megasonic cleaning system

Study the origin of pattern damage and design the megasonic with damage-free

Optimize the megasonic cleaning process to enhance the cleaning efficiency

Development of nanoparticle measuring equipment

Development of particle beam mass spectroscopy (PBMS)

Development of particle measurement equipment using light scattering

Development of low pressure differential mobility