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RESEARCH

ANALYSIS INSTRUMENTS

Processing equipment

  • Mask AlignerMask Aligner
  • RF&DC MagnetronSputtering SystemRF&DC Magnetron Sputtering System
  • PECVDPECVD
  • E-beam evaporatorE-beam evaporator
  • Thermal evaporatorThermal evaporator
  • Ion Beam AssistedDepositionIon Beam Assisted Deposition
  • High Resolution sputtercoater for FE-SEMHigh Resolution sputter coater for FE-SEM
  • ICP EtcherICP Etcher
  • Reactive ion etcherReactive ion etcher
  • Atomic LayerEtching SystemAtomic Layer Etching System
  • Neutral beametching systemNeutral beam etching system
  • Annealing systemAnnealing system
  • Dry ovenDry oven
  • Spin coaterSpin coater

Analysis Equipment

  • 8-inch probe station8-inch probe station
  • Field Emission Scanning Electron MicroscopeField Emission Scanning
    Electron Microscope
  • UV/VIS SpectrophotometeUV/VIS
    Spectrophotometer
  • Fluorescence spectrometerFluorescence
    spectrometer
  • Micro-Raman spectrometerMicro-Raman
    spectrometer
  • Small Angle X-ray DiffractometerSmall Angle
    X-ray Diffractometer
  • AFMAFM
  • Scanning Mobility Particle Sizer(SMPS)Scanning Mobility
    Particle Sizer(SMPS)
  • Wafer Surface ScannerWafer Surface Scanner
  • Surface profilometerSurface profilometer