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RESEARCH

Equipment

Fabrication Equipment

  • Thermal and e-beam Evaporator< Thermal and e-beam Evaporator >
    Material : Pd, Al, Au, Ti, Cu, etc.
  • RF/DC Magnetron Sputter for High-k Oxides< RF/DC Magnetron Sputter for High-k Oxides >
    Material : HfO2, ZrO2
  • RF/DC Magnetron Sputter for Various Metals< RF/DC Magnetron Sputter for Various Metals >
    Material : Cu, Ti, etc.
  • Home Made Rapid Thermal Processor< Home Made Rapid Thermal Processor >
     
  • Resistive Heating Furnace< Resistive Heating Furnace >
  • ULVAC MILA-3000 Rapid Thermal Processor< ULVAC MILA-3000 Rapid Thermal Processor >
  • Spin Coater< Spin Coater >
  • DI Water Supply System< DI Water Supply System >
  • Scrubber & Gas Supply System< Scrubber & Gas Supply System >

Analysis Equipment

  • Measurement System in Vacuum< Measurement System in Vacuum >
    - Three Terminal Probes
    - Microscope
    - Turbo/Rotary Pump
    - O2/N2/N2O Gas Supply
  • Probe Station< Probe Station >
     
     
     
     
  • Micro Scope< Micro Scope >
  • Probe Station with Microscope< Probe Station with Microscope >
  • Measurement System for Semiconductor Devices< Measurement System for Semiconductor Devices >
    HP 4145, HP4140
    Boonton, etc
  • Leica Microscope< Leica Microscope >

Scanning probe microrscopy

  • High Vacuum and Variable Temperature SPMSPA-300HV
    < High Vacuum and Variable Temperature SPM >
  • Multi Function SPM UnitSPA-400
    < Multi Function SPM Unit >

Atmosphere Pressure Plasma Etching Equipment

  • Cryostats< Cryostats >
    - Magnetic fields of up to 12 T
    - Inserts provide sample temperatures from 1.5 to 300 K.
  • Lock-in Amp< Lock-in Amp >
     
     
  • Cryostats controller and measurement system< Cryostats controller and measurement system >
  • Turbo pump< Turbo pump >
    - ~ 10-7 torr

Photoluminescence mesurement Equipment

  • Ar+ Laser-left side< Ar+ Laser-left side >
    - 488~ 514 nm, ~15 W
    < ND-YLF laser ?right side >
    -1053, 1313 nm
  • Voltage source< Voltage source >
    - -10 ~ +10 V
     
     
  • Monocro meter< Monocro meter >
    Triax 550

    - Spectra range 0 ~ 1500 nm
  • InGaAs Detector< InGaAs Detector >
    IGA020L
    - Wavelength
    800 ~ 1700 nm